[PmPattern]
PpId       PaId      PmId         Role
;Registermarken
rp1_l_f    pa_l_f    rm1_l_f      align
rp1_l_f    pa_l_f    rm2_l_f      align
rp1_l_f    pa_l_f    rm3_l_f      NONE
rp1_l_f    pa_l_f    rm4_l_f      NONE
rp1_l_f    pa_l_f    rm5_l_f      NONE
rp1_l_f    pa_l_f    rm6_l_f      align
rp2_l_f    pa_l_f    rm6_l_f      align
rp2_l_f    pa_l_f    rm7_l_f      NONE
rp2_l_f    pa_l_f    rm8_l_f      NONE
rp2_l_f    pa_l_f    rm9_l_f      align
rp2_l_f    pa_l_f    rm10_l_f     align
rp3_l_f    pa_l_f    rm9_l_f      align
rp3_l_f    pa_l_f    rm10_l_f     align
rp3_l_f    pa_l_f    rm11_l_f     NONE
rp3_l_f    pa_l_f    rm12_l_f     NONE
rp3_l_f    pa_l_f    rm13_l_f     align
rp4_l_f    pa_l_f    rm13_l_f     align
rp4_l_f    pa_l_f    rm14_l_f     NONE
rp4_l_f    pa_l_f    rm15_l_f     NONE
rp4_l_f    pa_l_f    rm16_l_f     align
rp4_l_f    pa_l_f    rm17_l_f     align
;Andruckmarken
ip1_l      pa_l_f    im1_l        NONE
ip1_l      pa_l_f    im2_l        NONE
ip1_l      pa_l_f    im3_l        NONE
ip1_l      pa_l_f    im4_l        NONE
ip1_l      pa_l_f    im5_l        NONE
ip1_l      pa_l_f    im6_l        NONE
ip1_l      pa_l_f    im7_l        NONE
ip1_l      pa_l_f    im8_l        NONE
ip1_l      pa_l_f    im9_l        NONE
ip2_l      pa_l_f    im10_l       NONE
ip2_l      pa_l_f    im11_l       NONE
ip2_l      pa_l_f    im12_l       NONE
ip2_l      pa_l_f    im13_l       NONE
ip2_l      pa_l_f    im14_l       NONE
ip2_l      pa_l_f    im15_l       NONE
ip3_l      pa_l_f    im16_l       NONE
ip3_l      pa_l_f    im17_l       NONE
ip3_l      pa_l_f    im18_l       NONE
ip3_l      pa_l_f    im19_l       NONE
ip3_l      pa_l_f    im20_l       NONE
ip3_l      pa_l_f    im21_l       NONE
ip4_l      pa_l_f    im22_l       NONE
ip4_l      pa_l_f    im23_l       NONE
ip4_l      pa_l_f    im24_l       NONE
ip4_l      pa_l_f    im25_l       NONE
ip4_l      pa_l_f    im26_l       NONE
ip4_l      pa_l_f    im27_l       NONE
ip1_l      pa_l_f    im28_l       NONE
ip1_l      pa_l_f    im29_l       NONE
ip1_l      pa_l_f    im30_l       NONE
;Substratmarken 
ip1_l      pa_l_f    im31_l       substrat
ip2_l      pa_l_f    im32_l       substrat
ip3_l      pa_l_f    im33_l       substrat
ip4_l      pa_l_f    im34_l       substrat
;-------------------------------------
;Registermarken
rp1_q_f    pa_q_f    rm1_q_f      align
rp1_q_f    pa_q_f    rm2_q_f      align
rp1_q_f    pa_q_f    rm3_q_f      align
rp1_q_f    pa_q_f    rm4_q_f      NONE
rp1_q_f    pa_q_f    rm5_q_f      NONE
rp1_q_f    pa_q_f    rm6_q_f      NONE
rp1_q_f    pa_q_f    rm7_q_f      NONE
rp1_q_f    pa_q_f    rm8_q_f      NONE
rp1_q_f    pa_q_f    rm9_q_f      NONE
rp1_q_f    pa_q_f    rm10_q_f     NONE
rp1_q_f    pa_q_f    rm11_q_f     NONE
rp1_q_f    pa_q_f    rm12_q_f     NONE
;Andruckmarken
ip1_q      pa_q_f    im1_q        NONE
ip1_q      pa_q_f    im2_q        NONE
ip1_q      pa_q_f    im3_q        NONE
ip1_q      pa_q_f    im4_q        NONE
ip1_q      pa_q_f    im5_q        NONE
ip1_q      pa_q_f    im6_q        NONE
ip1_q      pa_q_f    im7_q        NONE
ip1_q      pa_q_f    im8_q        NONE
ip1_q      pa_q_f    im9_q        NONE
ip1_q      pa_q_f    im10_q       NONE
ip1_q      pa_q_f    im11_q       NONE
ip1_q      pa_q_f    im12_q       NONE
ip1_q      pa_q_f    im13_q       NONE
ip1_q      pa_q_f    im14_q       NONE
ip1_q      pa_q_f    im15_q       NONE
ip1_q      pa_q_f    im16_q       NONE
ip1_q      pa_q_f    im17_q       NONE
ip1_q      pa_q_f    im18_q       NONE
ip1_q      pa_q_f    im19_q       NONE
ip1_q      pa_q_f    im20_q       NONE
ip1_q      pa_q_f    im21_q       NONE
ip1_q      pa_q_f    im22_q       NONE
ip1_q      pa_q_f    im23_q       NONE
ip1_q      pa_q_f    im24_q       NONE
ip1_q      pa_q_f    im25_q       NONE
ip1_q      pa_q_f    im26_q       NONE
ip1_q      pa_q_f    im27_q       NONE
ip1_q      pa_q_f    im28_q       NONE
ip1_q      pa_q_f    im29_q       NONE
ip1_q      pa_q_f    im30_q       NONE
;Substratmarken 
ip1_q      pa_q_f    im31_q       substrat
;-------------------------------------
;Registermarken
rp1_11     pa_11     rm1_11       align
rp1_11     pa_11     rm2_11       align
rp1_11     pa_11     rm3_11       NONE
rp1_11     pa_11     rm4_11       NONE
rp1_11     pa_11     rm5_11       NONE
rp1_11     pa_11     rm6_11       align
rp2_11     pa_11     rm7_11       align
rp2_11     pa_11     rm8_11       NONE
rp2_11     pa_11     rm9_11       NONE
rp2_11     pa_11     rm10_11       align
rp2_11     pa_11     rm11_11       align
rp3_11     pa_11     rm12_11       align
rp3_11     pa_11     rm13_11       align
rp3_11     pa_11     rm14_11       NONE
rp3_11     pa_11     rm15_11       NONE
rp3_11     pa_11     rm16_11       align
;Andruckmarken
ip1_11     pa_11     im1_11       NONE
ip1_11     pa_11     im2_11       NONE
ip1_11     pa_11     im3_11       NONE
ip1_11     pa_11     im4_11       NONE
ip1_11     pa_11     im5_11       NONE
ip1_11     pa_11     im6_11       NONE
ip1_11     pa_11     im7_11       NONE
ip1_11     pa_11     im8_11       NONE
ip1_11     pa_11     im9_11       NONE
ip1_11     pa_11     im10_11       NONE
ip1_11     pa_11     im11_11       NONE
ip1_11     pa_11     im12_11       NONE
ip2_11     pa_11     im13_11       NONE
ip2_11     pa_11     im14_11       NONE
ip2_11     pa_11     im15_11       NONE
ip2_11     pa_11     im16_11       NONE
ip2_11     pa_11     im17_11       NONE
ip2_11     pa_11     im18_11       NONE
ip3_11     pa_11     im19_11       NONE
ip3_11     pa_11     im20_11       NONE
ip3_11     pa_11     im21_11       NONE
ip3_11     pa_11     im22_11       NONE
ip3_11     pa_11     im23_11       NONE
ip3_11     pa_11     im24_11       NONE
;Substratmarken 
ip1_11     pa_11     sub1_11       substrat
ip2_11     pa_11     sub2_11       substrat
ip3_11     pa_11     sub3_11       substrat
;-------------------------------------
;Registermarken
rp1_12     pa_12     rm1_12       align
rp1_12     pa_12     rm2_12       align
rp1_12     pa_12     rm3_12       NONE
rp1_12     pa_12     rm4_12       NONE
rp1_12     pa_12     rm5_12       NONE
rp1_12     pa_12     rm6_12       align
rp2_12     pa_12     rm7_12       align
rp2_12     pa_12     rm8_12       NONE
rp2_12     pa_12     rm9_12       NONE
rp2_12     pa_12     rm10_12       align
rp3_12     pa_12     rm10_12       align
rp2_12     pa_12     rm11_12       align
rp3_12     pa_12     rm11_12       align
rp3_12     pa_12     rm12_12       NONE
rp3_12     pa_12     rm13_12       NONE
rp3_12     pa_12     rm14_12       align
;Andruckmarken
ip1_12     pa_12     im1_12       NONE
ip1_12     pa_12     im2_12       NONE
ip1_12     pa_12     im3_12       NONE
ip1_12     pa_12     im4_12       NONE
ip1_12     pa_12     im5_12       NONE
ip1_12     pa_12     im6_12       NONE
ip1_12     pa_12     im7_12       NONE
ip1_12     pa_12     im8_12       NONE
ip1_12     pa_12     im9_12       NONE
ip1_12     pa_12     im10_12       NONE
ip1_12     pa_12     im11_12       NONE
ip1_12     pa_12     im12_12       NONE
ip2_12     pa_12     im13_12       NONE
ip2_12     pa_12     im14_12       NONE
ip2_12     pa_12     im15_12       NONE
ip2_12     pa_12     im16_12       NONE
ip2_12     pa_12     im17_12       NONE
ip2_12     pa_12     im18_12       NONE
ip3_12     pa_12     im19_12       NONE
ip3_12     pa_12     im20_12       NONE
ip3_12     pa_12     im21_12       NONE
ip3_12     pa_12     im22_12       NONE
ip3_12     pa_12     im23_12       NONE
ip3_12     pa_12     im24_12       NONE
;Substratmarken 
ip1_12     pa_12     sub1_12       substrat
ip2_12     pa_12     sub2_12       substrat
ip3_12     pa_12     sub3_12       substrat
;-------------------------------------
;Registermarken
rp1_13     pa_13     rm1_13       align
rp1_13     pa_13     rm2_13       align
rp1_13     pa_13     rm3_13       NONE
rp1_13     pa_13     rm4_13       NONE
rp1_13     pa_13     rm5_13       NONE
rp1_13     pa_13     rm6_13       align
rp2_13     pa_13     rm7_13       align
rp2_13     pa_13     rm8_13       NONE
rp2_13     pa_13     rm9_13       NONE
rp2_13     pa_13     rm10_13       align
rp3_13     pa_13     rm10_13       align
rp2_13     pa_13     rm11_13       align
rp3_13     pa_13     rm11_13       align
rp3_13     pa_13     rm12_13       NONE
rp3_13     pa_13     rm13_13       NONE
rp3_13     pa_13     rm14_13       align
;Andruckmarken
ip1_13     pa_13     im1_13       NONE
ip1_13     pa_13     im2_13       NONE
ip1_13     pa_13     im3_13       NONE
ip1_13     pa_13     im4_13       NONE
ip1_13     pa_13     im5_13       NONE
ip1_13     pa_13     im6_13       NONE
ip1_13     pa_13     im7_13       NONE
ip1_13     pa_13     im8_13       NONE
ip1_13     pa_13     im9_13       NONE
ip1_13     pa_13     im10_13       NONE
ip1_13     pa_13     im11_13       NONE
ip1_13     pa_13     im12_13       NONE
ip2_13     pa_13     im13_13       NONE
ip2_13     pa_13     im14_13       NONE
ip2_13     pa_13     im15_13       NONE
ip2_13     pa_13     im16_13       NONE
ip2_13     pa_13     im17_13       NONE
ip2_13     pa_13     im18_13       NONE
ip3_13     pa_13     im19_13       NONE
ip3_13     pa_13     im20_13       NONE
ip3_13     pa_13     im21_13       NONE
ip3_13     pa_13     im22_13       NONE
ip3_13     pa_13     im23_13       NONE
ip3_13     pa_13     im24_13       NONE
;Substratmarken 
ip1_13     pa_13     sub1_13       substrat
ip2_13     pa_13     sub2_13       substrat
ip3_13     pa_13     sub3_13       substrat
;-------------------------------------
;Registermarken
rp1_14     pa_14     rm1_14       align
rp1_14     pa_14     rm2_14       align
rp1_14     pa_14     rm3_14       NONE
rp1_14     pa_14     rm4_14       NONE
rp1_14     pa_14     rm5_14       NONE
rp1_14     pa_14     rm6_14       align
rp2_14     pa_14     rm7_14       align
rp2_14     pa_14     rm8_14       NONE
rp2_14     pa_14     rm9_14       NONE
rp2_14     pa_14     rm10_14       align
rp2_14     pa_14     rm11_14       align
rp3_14     pa_14     rm12_14       align
rp3_14     pa_14     rm13_14       align
rp3_14     pa_14     rm14_14       NONE
rp3_14     pa_14     rm15_14       NONE
rp3_14     pa_14     rm16_14       align
;Andruckmarken
ip1_14     pa_14     im1_14       NONE
ip1_14     pa_14     im2_14       NONE
ip1_14     pa_14     im3_14       NONE
ip1_14     pa_14     im4_14       NONE
ip1_14     pa_14     im5_14       NONE
ip1_14     pa_14     im6_14       NONE
ip1_14     pa_14     im7_14       NONE
ip1_14     pa_14     im8_14       NONE
ip1_14     pa_14     im9_14       NONE
ip1_14     pa_14     im10_14       NONE
ip1_14     pa_14     im11_14       NONE
ip1_14     pa_14     im12_14       NONE
ip2_14     pa_14     im13_14       NONE
ip2_14     pa_14     im14_14       NONE
ip2_14     pa_14     im15_14       NONE
ip2_14     pa_14     im16_14       NONE
ip2_14     pa_14     im17_14       NONE
ip2_14     pa_14     im18_14       NONE
ip3_14     pa_14     im19_14       NONE
ip3_14     pa_14     im20_14       NONE
ip3_14     pa_14     im21_14       NONE
ip3_14     pa_14     im22_14       NONE
ip3_14     pa_14     im23_14       NONE
ip3_14     pa_14     im24_14       NONE
;Substratmarken 
ip1_14     pa_14     sub1_14       substrat
ip2_14     pa_14     sub2_14       substrat
ip3_14     pa_14     sub3_14       substrat
;-------------------------------------
;Registermarken
rp1_15     pa_15     rm1_15       align
rp1_15     pa_15     rm2_15       align
rp1_15     pa_15     rm3_15       NONE
rp1_15     pa_15     rm4_15       NONE
rp1_15     pa_15     rm5_15       NONE
rp1_15     pa_15     rm6_15       align
rp2_15     pa_15     rm7_15       align
rp2_15     pa_15     rm8_15       NONE
rp2_15     pa_15     rm9_15       NONE
rp2_15     pa_15     rm10_15       align
rp2_15     pa_15     rm11_15       align
rp3_15     pa_15     rm12_15       align
rp3_15     pa_15     rm13_15       align
rp3_15     pa_15     rm14_15       NONE
rp3_15     pa_15     rm15_15       NONE
rp3_15     pa_15     rm16_15       align
;Andruckmarken
ip1_15     pa_15     im1_15       NONE
ip1_15     pa_15     im2_15       NONE
ip1_15     pa_15     im3_15       NONE
ip1_15     pa_15     im4_15       NONE
ip1_15     pa_15     im5_15       NONE
ip1_15     pa_15     im6_15       NONE
ip1_15     pa_15     im7_15       NONE
ip1_15     pa_15     im8_15       NONE
ip1_15     pa_15     im9_15       NONE
ip1_15     pa_15     im10_15       NONE
ip1_15     pa_15     im11_15       NONE
ip1_15     pa_15     im12_15       NONE
ip2_15     pa_15     im13_15       NONE
ip2_15     pa_15     im14_15       NONE
ip2_15     pa_15     im15_15       NONE
ip2_15     pa_15     im16_15       NONE
ip2_15     pa_15     im17_15       NONE
ip2_15     pa_15     im18_15       NONE
ip3_15     pa_15     im19_15       NONE
ip3_15     pa_15     im20_15       NONE
ip3_15     pa_15     im21_15       NONE
ip3_15     pa_15     im22_15       NONE
ip3_15     pa_15     im23_15       NONE
ip3_15     pa_15     im24_15       NONE
;Substratmarken 
ip1_15     pa_15     sub1_15       substrat
ip2_15     pa_15     sub2_15       substrat
ip3_15     pa_15     sub3_15       substrat
;-------------------------------------
;Registermarken
rp1_16     pa_16     rm1_16       align
rp1_16     pa_16     rm2_16       align
rp1_16     pa_16     rm3_16       NONE
rp1_16     pa_16     rm4_16       NONE
rp1_16     pa_16     rm5_16       NONE
rp1_16     pa_16     rm6_16       align
rp2_16     pa_16     rm7_16       align
rp2_16     pa_16     rm8_16       NONE
rp2_16     pa_16     rm9_16       NONE
rp2_16     pa_16     rm10_16       align
rp2_16     pa_16     rm11_16       align
rp3_16     pa_16     rm12_16       align
rp3_16     pa_16     rm13_16       align
rp3_16     pa_16     rm14_16       NONE
rp3_16     pa_16     rm15_16       NONE
rp3_16     pa_16     rm16_16       align
;Andruckmarken
ip1_16     pa_16     im1_16       NONE
ip1_16     pa_16     im2_16       NONE
ip1_16     pa_16     im3_16       NONE
ip1_16     pa_16     im4_16       NONE
ip1_16     pa_16     im5_16       NONE
ip1_16     pa_16     im6_16       NONE
ip1_16     pa_16     im7_16       NONE
ip1_16     pa_16     im8_16       NONE
ip1_16     pa_16     im9_16       NONE
ip1_16     pa_16     im10_16       NONE
ip1_16     pa_16     im11_16       NONE
ip1_16     pa_16     im12_16       NONE
ip2_16     pa_16     im13_16       NONE
ip2_16     pa_16     im14_16       NONE
ip2_16     pa_16     im15_16       NONE
ip2_16     pa_16     im16_16       NONE
ip2_16     pa_16     im17_16       NONE
ip2_16     pa_16     im18_16       NONE
ip3_16     pa_16     im19_16       NONE
ip3_16     pa_16     im20_16       NONE
ip3_16     pa_16     im21_16       NONE
ip3_16     pa_16     im22_16       NONE
ip3_16     pa_16     im23_16       NONE
ip3_16     pa_16     im24_16       NONE
;Substratmarken 
ip1_16     pa_16     sub1_16       substrat
ip2_16     pa_16     sub2_16       substrat
ip3_16     pa_16     sub3_16       substrat
;-------------------------------------
;Registermarken
rp1_17     pa_17     rm1_17       align
rp1_17     pa_17     rm2_17       align
rp1_17     pa_17     rm3_17       NONE
rp1_17     pa_17     rm4_17       NONE
rp1_17     pa_17     rm5_17       NONE
rp1_17     pa_17     rm6_17       align
rp2_17     pa_17     rm7_17       align
rp2_17     pa_17     rm8_17       NONE
rp2_17     pa_17     rm9_17       NONE
rp2_17     pa_17     rm10_17       align
rp2_17     pa_17     rm11_17       align
rp3_17     pa_17     rm12_17       align
rp3_17     pa_17     rm13_17       align
rp3_17     pa_17     rm14_17       NONE
rp3_17     pa_17     rm15_17       NONE
rp3_17     pa_17     rm16_17       align
;Andruckmarken
ip1_17     pa_17     im1_17       NONE
ip1_17     pa_17     im2_17       NONE
ip1_17     pa_17     im3_17       NONE
ip1_17     pa_17     im4_17       NONE
ip1_17     pa_17     im5_17       NONE
ip1_17     pa_17     im6_17       NONE
ip1_17     pa_17     im7_17       NONE
ip1_17     pa_17     im8_17       NONE
ip1_17     pa_17     im9_17       NONE
ip1_17     pa_17     im10_17       NONE
ip1_17     pa_17     im11_17       NONE
ip1_17     pa_17     im12_17       NONE
ip2_17     pa_17     im13_17       NONE
ip2_17     pa_17     im14_17       NONE
ip2_17     pa_17     im15_17       NONE
ip2_17     pa_17     im16_17       NONE
ip2_17     pa_17     im17_17       NONE
ip2_17     pa_17     im18_17       NONE
ip3_17     pa_17     im19_17       NONE
ip3_17     pa_17     im20_17       NONE
ip3_17     pa_17     im21_17       NONE
ip3_17     pa_17     im22_17       NONE
ip3_17     pa_17     im23_17       NONE
ip3_17     pa_17     im24_17       NONE
;Substratmarken 
ip1_17     pa_17     sub1_17       substrat
ip2_17     pa_17     sub2_17       substrat
ip3_17     pa_17     sub3_17       substrat
;-------------------------------------
;Registermarken
rp1_18     pa_18     rm1_18       align
rp1_18     pa_18     rm2_18       align
rp1_18     pa_18     rm3_18       NONE
rp1_18     pa_18     rm4_18       NONE
rp1_18     pa_18     rm5_18       NONE
rp1_18     pa_18     rm6_18       align
rp2_18     pa_18     rm7_18       align
rp2_18     pa_18     rm8_18       NONE
rp2_18     pa_18     rm9_18       NONE
rp2_18     pa_18     rm10_18       align
rp3_18     pa_18     rm10_18       align
rp2_18     pa_18     rm11_18       align
rp3_18     pa_18     rm11_18       align
rp3_18     pa_18     rm12_18       NONE
rp3_18     pa_18     rm13_18       NONE
rp3_18     pa_18     rm14_18       align
;Andruckmarken
ip1_18     pa_18     im1_18       NONE
ip1_18     pa_18     im2_18       NONE
ip1_18     pa_18     im3_18       NONE
ip1_18     pa_18     im4_18       NONE
ip1_18     pa_18     im5_18       NONE
ip1_18     pa_18     im6_18       NONE
ip1_18     pa_18     im7_18       NONE
ip1_18     pa_18     im8_18       NONE
ip1_18     pa_18     im9_18       NONE
ip1_18     pa_18     im10_18       NONE
ip1_18     pa_18     im11_18       NONE
ip1_18     pa_18     im12_18       NONE
ip2_18     pa_18     im13_18       NONE
ip2_18     pa_18     im14_18       NONE
ip2_18     pa_18     im15_18       NONE
ip2_18     pa_18     im16_18       NONE
ip2_18     pa_18     im17_18       NONE
ip2_18     pa_18     im18_18       NONE
ip3_18     pa_18     im19_18       NONE
ip3_18     pa_18     im20_18       NONE
ip3_18     pa_18     im21_18       NONE
ip3_18     pa_18     im22_18       NONE
ip3_18     pa_18     im23_18       NONE
ip3_18     pa_18     im24_18       NONE
;Substratmarken 
ip1_18     pa_18     sub1_18       substrat
ip2_18     pa_18     sub2_18       substrat
ip3_18     pa_18     sub3_18       substrat
;-------------------------------------
;Registermarken
rp1_19     pa_19     rm1_19       align
rp1_19     pa_19     rm2_19       align
rp1_19     pa_19     rm3_19       NONE
rp1_19     pa_19     rm4_19       NONE
rp1_19     pa_19     rm5_19       NONE
rp1_19     pa_19     rm6_19       align
rp2_19     pa_19     rm7_19       align
rp2_19     pa_19     rm8_19       NONE
rp2_19     pa_19     rm9_19       NONE
rp2_19     pa_19     rm10_19       align
rp3_19     pa_19     rm10_19       align
rp2_19     pa_19     rm11_19       align
rp3_19     pa_19     rm11_19       align
rp3_19     pa_19     rm12_19       NONE
rp3_19     pa_19     rm13_19       NONE
rp3_19     pa_19     rm14_19       align
;Andruckmarken
ip1_19     pa_19     im1_19       NONE
ip1_19     pa_19     im2_19       NONE
ip1_19     pa_19     im3_19       NONE
ip1_19     pa_19     im4_19       NONE
ip1_19     pa_19     im5_19       NONE
ip1_19     pa_19     im6_19       NONE
ip1_19     pa_19     im7_19       NONE
ip1_19     pa_19     im8_19       NONE
ip1_19     pa_19     im9_19       NONE
ip1_19     pa_19     im10_19       NONE
ip1_19     pa_19     im11_19       NONE
ip1_19     pa_19     im12_19       NONE
ip2_19     pa_19     im13_19       NONE
ip2_19     pa_19     im14_19       NONE
ip2_19     pa_19     im15_19       NONE
ip2_19     pa_19     im16_19       NONE
ip2_19     pa_19     im17_19       NONE
ip2_19     pa_19     im18_19       NONE
ip3_19     pa_19     im19_19       NONE
ip3_19     pa_19     im20_19       NONE
ip3_19     pa_19     im21_19       NONE
ip3_19     pa_19     im22_19       NONE
ip3_19     pa_19     im23_19       NONE
ip3_19     pa_19     im24_19       NONE
;Substratmarken 
ip1_19     pa_19     sub1_19       substrat
ip2_19     pa_19     sub2_19       substrat
ip3_19     pa_19     sub3_19       substrat
;-------------------------------------
;Registermarken
rp1_20     pa_20     rm1_20       align
rp1_20     pa_20     rm2_20       align
rp1_20     pa_20     rm3_20       NONE
rp1_20     pa_20     rm4_20       NONE
rp1_20     pa_20     rm5_20       NONE
rp1_20     pa_20     rm6_20       align
rp2_20     pa_20     rm7_20       align
rp2_20     pa_20     rm8_20       NONE
rp2_20     pa_20     rm9_20       NONE
rp2_20     pa_20     rm10_20       align
rp2_20     pa_20     rm11_20       align
rp3_20     pa_20     rm12_20       align
rp3_20     pa_20     rm13_20       align
rp3_20     pa_20     rm14_20       NONE
rp3_20     pa_20     rm15_20       NONE
rp3_20     pa_20     rm16_20       align
;Andruckmarken
ip1_20     pa_20     im1_20       NONE
ip1_20     pa_20     im2_20       NONE
ip1_20     pa_20     im3_20       NONE
ip1_20     pa_20     im4_20       NONE
ip1_20     pa_20     im5_20       NONE
ip1_20     pa_20     im6_20       NONE
ip1_20     pa_20     im7_20       NONE
ip1_20     pa_20     im8_20       NONE
ip1_20     pa_20     im9_20       NONE
ip1_20     pa_20     im10_20       NONE
ip1_20     pa_20     im11_20       NONE
ip1_20     pa_20     im12_20       NONE
ip2_20     pa_20     im13_20       NONE
ip2_20     pa_20     im14_20       NONE
ip2_20     pa_20     im15_20       NONE
ip2_20     pa_20     im16_20       NONE
ip2_20     pa_20     im17_20       NONE
ip2_20     pa_20     im18_20       NONE
ip3_20     pa_20     im19_20       NONE
ip3_20     pa_20     im20_20       NONE
ip3_20     pa_20     im21_20       NONE
ip3_20     pa_20     im22_20       NONE
ip3_20     pa_20     im23_20       NONE
ip3_20     pa_20     im24_20       NONE
;Substratmarken 
ip1_20     pa_20     sub1_20       substrat
ip2_20     pa_20     sub2_20       substrat
ip3_20     pa_20     sub3_20       substrat
;-------------------------------------
;Registermarken
rp1_21     pa_21     rm1_21       align
rp1_21     pa_21     rm2_21       align
rp1_21     pa_21     rm3_21       NONE
rp1_21     pa_21     rm4_21       NONE
rp1_21     pa_21     rm5_21       NONE
rp1_21     pa_21     rm6_21       align
rp2_21     pa_21     rm7_21       align
rp2_21     pa_21     rm8_21       NONE
rp2_21     pa_21     rm9_21       NONE
rp2_21     pa_21     rm10_21       align
rp2_21     pa_21     rm11_21       align
rp3_21     pa_21     rm12_21       align
rp3_21     pa_21     rm13_21       align
rp3_21     pa_21     rm14_21       NONE
rp3_21     pa_21     rm15_21       NONE
rp3_21     pa_21     rm16_21       align
;Andruckmarken
ip1_21     pa_21     im1_21       NONE
ip1_21     pa_21     im2_21       NONE
ip1_21     pa_21     im3_21       NONE
ip1_21     pa_21     im4_21       NONE
ip1_21     pa_21     im5_21       NONE
ip1_21     pa_21     im6_21       NONE
ip1_21     pa_21     im7_21       NONE
ip1_21     pa_21     im8_21       NONE
ip1_21     pa_21     im9_21       NONE
ip1_21     pa_21     im10_21       NONE
ip1_21     pa_21     im11_21       NONE
ip1_21     pa_21     im12_21       NONE
ip2_21     pa_21     im13_21       NONE
ip2_21     pa_21     im14_21       NONE
ip2_21     pa_21     im15_21       NONE
ip2_21     pa_21     im16_21       NONE
ip2_21     pa_21     im17_21       NONE
ip2_21     pa_21     im18_21       NONE
ip3_21     pa_21     im19_21       NONE
ip3_21     pa_21     im20_21       NONE
ip3_21     pa_21     im21_21       NONE
ip3_21     pa_21     im22_21       NONE
ip3_21     pa_21     im23_21       NONE
ip3_21     pa_21     im24_21       NONE
;Substratmarken 
ip1_21     pa_21     sub1_21       substrat
ip2_21     pa_21     sub2_21       substrat
ip3_21     pa_21     sub3_21       substrat
;-------------------------------------
;Registermarken
rp1_22     pa_22     rm1_22       align
rp1_22     pa_22     rm2_22       align
rp1_22     pa_22     rm3_22       NONE
rp1_22     pa_22     rm4_22       NONE
rp1_22     pa_22     rm5_22       NONE
rp1_22     pa_22     rm6_22       align
rp2_22     pa_22     rm7_22       align
rp2_22     pa_22     rm8_22       NONE
rp2_22     pa_22     rm9_22       NONE
rp2_22     pa_22     rm10_22       align
rp2_22     pa_22     rm11_22       align
rp3_22     pa_22     rm12_22       align
rp3_22     pa_22     rm13_22       align
rp3_22     pa_22     rm14_22       NONE
rp3_22     pa_22     rm15_22       NONE
rp3_22     pa_22     rm16_22       align
;Andruckmarken
ip1_22     pa_22     im1_22       NONE
ip1_22     pa_22     im2_22       NONE
ip1_22     pa_22     im3_22       NONE
ip1_22     pa_22     im4_22       NONE
ip1_22     pa_22     im5_22       NONE
ip1_22     pa_22     im6_22       NONE
ip1_22     pa_22     im7_22       NONE
ip1_22     pa_22     im8_22       NONE
ip1_22     pa_22     im9_22       NONE
ip1_22     pa_22     im10_22       NONE
ip1_22     pa_22     im11_22       NONE
ip1_22     pa_22     im12_22       NONE
ip2_22     pa_22     im13_22       NONE
ip2_22     pa_22     im14_22       NONE
ip2_22     pa_22     im15_22       NONE
ip2_22     pa_22     im16_22       NONE
ip2_22     pa_22     im17_22       NONE
ip2_22     pa_22     im18_22       NONE
ip3_22     pa_22     im19_22       NONE
ip3_22     pa_22     im20_22       NONE
ip3_22     pa_22     im21_22       NONE
ip3_22     pa_22     im22_22       NONE
ip3_22     pa_22     im23_22       NONE
ip3_22     pa_22     im24_22       NONE
;Substratmarken 
ip1_22     pa_22     sub1_22       substrat
ip2_22     pa_22     sub2_22       substrat
ip3_22     pa_22     sub3_22       substrat
;-------------------------------------
;Registermarken
rp1_23     pa_23     rm1_23       align
rp1_23     pa_23     rm2_23       align
rp1_23     pa_23     rm3_23       NONE
rp1_23     pa_23     rm4_23       NONE
rp1_23     pa_23     rm5_23       NONE
rp1_23     pa_23     rm6_23       align
rp2_23     pa_23     rm7_23       align
rp2_23     pa_23     rm8_23       NONE
rp2_23     pa_23     rm9_23       NONE
rp2_23     pa_23     rm10_23       align
rp2_23     pa_23     rm11_23       align
rp3_23     pa_23     rm12_23       align
rp3_23     pa_23     rm13_23       align
rp3_23     pa_23     rm14_23       NONE
rp3_23     pa_23     rm15_23       NONE
rp3_23     pa_23     rm16_23       align
;Andruckmarken
ip1_23     pa_23     im1_23       NONE
ip1_23     pa_23     im2_23       NONE
ip1_23     pa_23     im3_23       NONE
ip1_23     pa_23     im4_23       NONE
ip1_23     pa_23     im5_23       NONE
ip1_23     pa_23     im6_23       NONE
ip1_23     pa_23     im7_23       NONE
ip1_23     pa_23     im8_23       NONE
ip1_23     pa_23     im9_23       NONE
ip1_23     pa_23     im10_23       NONE
ip1_23     pa_23     im11_23       NONE
ip1_23     pa_23     im12_23       NONE
ip2_23     pa_23     im13_23       NONE
ip2_23     pa_23     im14_23       NONE
ip2_23     pa_23     im15_23       NONE
ip2_23     pa_23     im16_23       NONE
ip2_23     pa_23     im17_23       NONE
ip2_23     pa_23     im18_23       NONE
ip3_23     pa_23     im19_23       NONE
ip3_23     pa_23     im20_23       NONE
ip3_23     pa_23     im21_23       NONE
ip3_23     pa_23     im22_23       NONE
ip3_23     pa_23     im23_23       NONE
ip3_23     pa_23     im24_23       NONE
;Substratmarken 
ip1_23     pa_23     sub1_23       substrat
ip2_23     pa_23     sub2_23       substrat
ip3_23     pa_23     sub3_23       substrat
;-------------------------------------
;Registermarken
rp1_24     pa_24     rm1_24       align
rp1_24     pa_24     rm2_24       align
rp1_24     pa_24     rm3_24       NONE
rp1_24     pa_24     rm4_24       NONE
rp1_24     pa_24     rm5_24       NONE
rp1_24     pa_24     rm6_24       align
rp2_24     pa_24     rm7_24       align
rp2_24     pa_24     rm8_24       NONE
rp2_24     pa_24     rm9_24       NONE
rp2_24     pa_24     rm10_24       align
rp2_24     pa_24     rm11_24       align
rp3_24     pa_24     rm12_24       align
rp3_24     pa_24     rm13_24       align
rp3_24     pa_24     rm14_24       NONE
rp3_24     pa_24     rm15_24       NONE
rp3_24     pa_24     rm16_24       align
;Andruckmarken
ip1_24     pa_24     im1_24       NONE
ip1_24     pa_24     im2_24       NONE
ip1_24     pa_24     im3_24       NONE
ip1_24     pa_24     im4_24       NONE
ip1_24     pa_24     im5_24       NONE
ip1_24     pa_24     im6_24       NONE
ip1_24     pa_24     im7_24       NONE
ip1_24     pa_24     im8_24       NONE
ip1_24     pa_24     im9_24       NONE
ip1_24     pa_24     im10_24       NONE
ip1_24     pa_24     im11_24       NONE
ip1_24     pa_24     im12_24       NONE
ip2_24     pa_24     im13_24       NONE
ip2_24     pa_24     im14_24       NONE
ip2_24     pa_24     im15_24       NONE
ip2_24     pa_24     im16_24       NONE
ip2_24     pa_24     im17_24       NONE
ip2_24     pa_24     im18_24       NONE
ip3_24     pa_24     im19_24       NONE
ip3_24     pa_24     im20_24       NONE
ip3_24     pa_24     im21_24       NONE
ip3_24     pa_24     im22_24       NONE
ip3_24     pa_24     im23_24       NONE
ip3_24     pa_24     im24_24       NONE
;Substratmarken 
ip1_24     pa_24     sub1_24       substrat
ip2_24     pa_24     sub2_24       substrat
ip3_24     pa_24     sub3_24       substrat
;-------------------------------------
;Registermarken
rp1_25     pa_25     rm1_25       align
rp1_25     pa_25     rm2_25       align
rp1_25     pa_25     rm3_25       NONE
rp1_25     pa_25     rm4_25       NONE
rp1_25     pa_25     rm5_25       NONE
rp1_25     pa_25     rm6_25       align
rp2_25     pa_25     rm7_25       align
rp2_25     pa_25     rm8_25       NONE
rp2_25     pa_25     rm9_25       NONE
rp2_25     pa_25     rm10_25       align
rp3_25     pa_25     rm10_25       align
rp2_25     pa_25     rm11_25       align
rp3_25     pa_25     rm11_25       align
rp3_25     pa_25     rm12_25       NONE
rp3_25     pa_25     rm13_25       NONE
rp3_25     pa_25     rm14_25       align
;Andruckmarken
ip1_25     pa_25     im1_25       NONE
ip1_25     pa_25     im2_25       NONE
ip1_25     pa_25     im3_25       NONE
ip1_25     pa_25     im4_25       NONE
ip1_25     pa_25     im5_25       NONE
ip1_25     pa_25     im6_25       NONE
ip1_25     pa_25     im7_25       NONE
ip1_25     pa_25     im8_25       NONE
ip1_25     pa_25     im9_25       NONE
ip1_25     pa_25     im10_25       NONE
ip1_25     pa_25     im11_25       NONE
ip1_25     pa_25     im12_25       NONE
ip2_25     pa_25     im13_25       NONE
ip2_25     pa_25     im14_25       NONE
ip2_25     pa_25     im15_25       NONE
ip2_25     pa_25     im16_25       NONE
ip2_25     pa_25     im17_25       NONE
ip2_25     pa_25     im18_25       NONE
ip3_25     pa_25     im19_25       NONE
ip3_25     pa_25     im20_25       NONE
ip3_25     pa_25     im21_25       NONE
ip3_25     pa_25     im22_25       NONE
ip3_25     pa_25     im23_25       NONE
ip3_25     pa_25     im24_25       NONE
;Substratmarken 
ip1_25     pa_25     sub1_25       substrat
ip2_25     pa_25     sub2_25       substrat
ip3_25     pa_25     sub3_25       substrat
